Plasma Chemistry III
Plasma Chemistry III
Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization
The Mechanism and kinetics of plasma polymerizationElementary processes at solid surfaces immersed in low pressure plasmas.
| ISBN | 9783662159729 |
|---|---|
| Article number | 9783662159729 |
| Media type | Book |
| Edition number | Softcover reprint of the original 1st ed. 1980 |
| Copyright year | 2013 |
| Publisher | Springer, Berlin |
| Length | 132 pages |
| Illustrations | IV, 132 p. 14 illus. |
| Language | English |
