Scanning Electron Microscopy
Physics of Image Formation and Microanalysis
Scanning Electron Microscopy
Physics of Image Formation and Microanalysis
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Emission of Backscattered and Secondary Electrons
Electron Detectors and Spectrometers
Image Contrast and Signal Processing
Electron-Beam-Induced Current and Cathodoluminescence
Special Techniques in SEM
Crystal Structure Analysis by Diffraction
Elemental Analysis and Imaging with X-Rays.
Electron Optics of a Scanning Electron Microscope
Electron Scattering and DiffusionEmission of Backscattered and Secondary Electrons
Electron Detectors and Spectrometers
Image Contrast and Signal Processing
Electron-Beam-Induced Current and Cathodoluminescence
Special Techniques in SEM
Crystal Structure Analysis by Diffraction
Elemental Analysis and Imaging with X-Rays.
| ISBN | 978-3-540-63976-3 |
|---|---|
| Article number | 9783540639763 |
| Media type | Book |
| Edition number | 2nd, rev. and upd. ed. |
| Copyright year | 1998 |
| Publisher | Springer, Berlin |
| Length | XIV, 529 pages |
| Illustrations | XIV, 529 p. |
| Language | English |
