Electron energy loss spectroscopy has become an indispensable tool in surface analysis. Although the basic physics of this technique is well understood, instrument design has previously largely been left to intuition. This book is the first to provide a comprehensive treatment of the electron optics involved in the production of intense monochromatic beams and the detection of scattered electrons. It includes a full three-dimensional analysis of the electron optical properties of electron emission systems, monochromators and lens systems, placing particular emphasis on the procedures for matching the various components. The description is kept mathematically simple and focuses on practical aspects, with many hints for writing computer codes to calculate and optimize electrostatic lens elements.

1. Introduction

2. The Computational Procedures
3. The Electron Optics of the Cylindrical Deflector
4. The Electron Optics of the Ideal Cylindrical Field with Space Charge
5. Electron Optics of Real Cylindrical Deflectors Loaded with High Current
6. Electron Emission Systems
7. Lens Systems
8. Comparison of Experiment and Simulation
References.