Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Electron Optics of a Scanning Electron Microscope

Electron Scattering and Diffusion
Emission of Backscattered and Secondary Electrons
Electron Detectors and Spectrometers
Image Contrast and Signal Processing
Electron-Beam-Induced Current and Cathodoluminescence
Special Techniques in SEM
Crystal Structure Analysis by Diffraction
Elemental Analysis and Imaging with X-Rays.